Tris(diethylamido)(tert-butylimido)tantalum(V),packaged for use in deposition systems

Item Number: 668990-10G

Unit of Measure: 1 X 10 g

Packaging: 10 g in stainless steel cylinder

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Current delivery time on request

Synonyms: CVD_ALD_Precursors; CVD_deposition_system; 169896-41-7; OMTA082

CAS Number: 169896-41-7

Manufacturer: Sigma-Aldrich

Manufacturer Number: 668990-10G

Chemical Formula: (CH₃)₃CNTa(N(C₂H₅)₂)₃

Dangerous Goods Class: 4.3

Packing Group: II

UN Number: 3398

Storage Temperature: ROOM TEMPERATURE

Safety Data Sheet (other languages on request)