Tetrakis(ethylmethylamido)hafnium(IV),≥99.99% trace metals basis

Item Number: 553123-5ML

Unit of Measure: 1 X 5 mL

Packaging: 5, 25 mL in ampule

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Synonyms: CVD_ALD_Precursors; 352535-01-4; T283054; OMHF083; 727720; OMHF083.1; 72-7720

CAS Number: 352535-01-4

Manufacturer: Sigma-Aldrich

Manufacturer Number: 553123-5ML

Chemical Formula: [(CH₃)(C₂H₅)N]₄Hf

Dangerous Goods Class: 4.3

Packing Group: II

UN Number: 3398

Storage Temperature: ROOM TEMPERATURE

Safety Data Sheet (other languages on request)