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Tris(diethylamido)(tert-butylimido)tantalum(V),packaged for use in deposition systems

Item Number: 668990-10G
Unit of Measure: 1 X 10 g
Packaging: 10 g in stainless steel cylinder
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2,590.00 CHF 2590.0 CHF 2,590.00 CHF

2,590.00 CHF

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    Synonyms: CVD_ALD_Precursors; CVD_deposition_system; 169896-41-7; OMTA082
    CAS Number: 169896-41-7
    Manufacturer: Sigma-Aldrich
    Manufacturer Number: 668990-10G
    Chemical Formula: (CH₃)₃CNTa(N(C₂H₅)₂)₃
    Dangerous Goods Class: 4.3
    Packing Group: II
    UN Number: 3398
    Storage Temperature: ROOM TEMPERATURE
    Safety Data Sheet (other languages on request)