Tris(diethylamido)(tert-butylimido)tantalum(V),99%, ≥99.99% trace metals basis

Item Number: 521280-5ML

Unit of Measure: 1 X 5 mL

Packaging: 5 mL in ampule

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Synonyms: CVD_ALD_Precursors; 169896-41-7; sc-229641; 43419; OMTA082

CAS Number: 169896-41-7

Manufacturer: Sigma-Aldrich

Manufacturer Number: 521280-5ML

Chemical Formula: (CH₃)₃CNTa(N(C₂H₅)₂)₃

Dangerous Goods Class: 4.3

Packing Group: II

UN Number: 3398

Storage Temperature: ROOM TEMPERATURE

Safety Data Sheet (other languages on request)